Gas & Flame Detection | Portable Gas Detectors | Semiconductor Manufacturing / Specialty Gas Detectors
Cosmos XP-703DIII Trace Leak Detector for Semiconductor Gas – Portable Gas Detector
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- Portable Gas Detectors
- Cosmos XO-326IIs Drop-Type O2 Monitor – Portable Gas Detector
- Cosmos XP-302M for Combustible Gas, O2, CO & H2S – Portable Gas Detector
- Cosmos XP-308B for Formaldehyde – Portable Gas Detector
- Cosmos XP-3120-V for Volatile Organic Compound (VOC) – Portable Gas Detector
- Cosmos XP-3310II for Combustible Gas (in %LEL) – Portable Gas Detector
- Cosmos XP-3340II Flammable / CO2 / Inert Gas Detector (in %VOL) – Portable Gas Detector
- Cosmos XP-3318II for Combustible Gas (in %LEL) and O2 – Portable Gas Detector
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- Cosmos XP-3368II for Combustible Gas (in PPM) and O2 – Portable Gas Detector
- Cosmos XP-3368II-W for Combustible Gas (in PPM & %LEL) and O2 – Portable Gas Detector
- Cosmos XP-3380II-E O2 Monitor for High Temperature/Flue Gas – Portable Gas Detector
- Cosmos XP-3380II Portable O2 Monitor – Portable Gas Detector
- Cosmos XP-702III Super Sensitive Combustible Gas and Freon Detector – Portable Gas Detector
- Cosmos XP-703DIII Trace Leak Detector for Semiconductor Gas – Portable Gas Detector
- Cosmos XP-704III Refrigerant Gas Detector – Portable Gas Detector
- Cosmos XPS-7II for Semiconductor / Specialty Gas – Portable Gas Detector
- Gas Detector Tubes
- Semiconductor Manufacturing / Specialty Gas Detectors
- Fixed Gas Detector Transmitters
- New Cosmos KS-7O Fixed Oxygen Monitor
- New Cosmos Fixed Gas Detector KD-12 Ex-proof Structure
- Cosmos KS-7D Fixed Gas Transmitter for Carbon Monoxide
- Cosmos KS-7R Fixed Gas Transmitter for Carbon Dioxide
- New Cosmos PD-12 Ex-proof Suction Type
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- Sensus 405S Multi-jet Meter / DN15 to DN40
- Sensus 420PC High Accuracy Multi-jet Meter / DN15 to DN40
- Sensus 620 Piston Meter / DN15 to DN40
- Sensus AN130 Multi-Jet Meter / 130 degC / DN15 to DN40
- Sensus Meistream Plus Turbine Meter / High Accuracy / 50degC / DN40 to DN300
- Sensus Meistream Turbine Meter / 50degC / PN16 / DN40 to DN300
- Sensus Meistream Turbine Meter / 50degC / PN40 / DN40 to DN300
- Sensus Residia Jet Single Jet Meter / DN15 to DN20
- Sensus WP Dynamic Turbine Meter / 50degC / DN40 to DN400
- Sensus WP-QF Turbine Meter / 50degC / PN 40 / DN200 to DN300
- Sensus WP-QF Turbine Meter / DN500 to DN800
- Water Meters (Electromagnetic / Ultrasonic)
- Clamp-On Ultrasonic Flowmeters
- KATRONIC KATflow 100 / Fixed / 10 to 3,000mm / Single Channel
- KATRONIC KATflow 150 / Fixed / 10 to 6,500mm / Dual Channel
- KATRONIC KATflow 170 / Fixed / 10 to 3,000mm / 2CH / Ex-proof
- KATRONIC KATflow 200 / Portable / 10 to 6,500mm / 24hr battery / 1CH
- KATRONIC KATflow 210 / Portable / 50 to 2,500mm / 100hr battery / 1CH
- KATRONIC KATflow 230/Porable/10 to 6,500mm/24hr Battery/ 2CH
- Rotameters
- Gas Pressure Regulators
- PLEXOR Inspection System for Gas Metering and Pressure Regulating Stations

Cosmos XP-703DIII Trace Leak Detector for Semiconductor Gas – Portable Gas Detector
The XP-703DIII series gas detectors are highly effective tools for swiftly detecting trace leaks. With a short response time, these detectors come with a user-friendly alarm feature that varies in frequency based on the concentration of the detected gas, providing intermittent to continuous alarms. The detectors also include a standard integrated gas sampling pump for efficient gas detection.
The XP-703DIII is specifically suited for trace leak detection of gases commonly used in semiconductor manufacturing, including Arsine, Phosphine, Diborane, Silane, Hydrogen, and more.
Options available for the XP-703DIII series include earphones, telescopic sampling probes, and sampling attachments, enhancing user convenience and adaptability.
Technical Data
Gas Detected:
- Arsine
- Phosphine
- Diborane
- Silane, etc.
Options Available:
- Earphones
- Telescopic Sampling Probe
- Sampling Attachments
The XP-703DIII Trace Leak Detector is an essential tool for semiconductor gas applications, providing rapid and reliable detection of trace leaks and ensuring safety and efficiency in the semiconductor manufacturing process.
Gas Type | Min. detectable concentration (ppm) |
Arsine | 0.5 |
Phosphine | 0.3 |
Diborane | 0.2 |
Silane | 0.5 |
Hydrogen | 1.0 |